NIPPON FUSSO CO.,LTD. Japanese
+81-3-3688-3237Osaka (head office) +81-72-361-3391
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  Problems solved by fluoropolymer coating
Function
Non-stick
Anti-corrosion
High purity(counter elution)
High purity(counter particle)
Anti-electrostatic discharge
Low friction
Insulation
Application
Reactor
Stock
Dryer
Transportation, Handling
Mixing
Absorption/Adsorption
Separation/Filtration
Scaling
Coater
Semiconductor manufacturing device
Liquid Crystal/Organic Electroluminescent Manufacturing Equipment
Molding
Accessories
Laboratory equipments
Original Our Product (Coating Specifications)  
Ceramic Coating : NF-5340 NEW
Aμcoat®
EC Series
Anti ESD Coating (ESD=Electro Static Discharge)
Richil lining
Tack free
Original Our Product (Design/Manufacture of Apparatuses)
Heat Exchanger NEW
Non-metal PEC
List of Fluoropolymer Grades

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NIPPON FUSSO CO.,LTD.
2-4-6, Mokuzaidori, Miharaku,
Sakai, Osaka
Postal Code: 587-0042
TEL +81-72-361-3391
FAX +81-72-363-1230

HOMEProductsProblems solved by fluoropolymer coatingApplication > Semiconductor manufacturing device


Problems solved by fluoropolymer coating

Semiconductor manufacturing device

Wet cleaning equipment

Metal free fluoropolymer coating
Highly pure fluoropolymer coating prevents device contamination from metal ion elution.

 

Elution test data


■Elution test results from sample test pot

Unit: ppb

Na Mg Al K Tl Cr Fe Ni Cu Zn
<0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5

Film thickness: 300μm
Coating specification: NF-036SP
Substrate: SUS-304
Elution test conditions: 36%HCI RT 1Week

 

Advantage of Application: No.1

Less contamination on surface

Particle reduction

Less silicon wafer edge damage

 

Advantage of Application: No. 2

Prevents external contamination due to chemical permeation

Mechanical strength is available for using metal vessel.

Improves thermal conduction efficiency

Advantage of Application: No. 3

Prevents external contamination due to chemical permeation

Mechanical strength is available for using metal vessel.

Improves thermal conduction efficiency

   
   

Improved strength for resin molded items

Advantage of Application

Enables use of metal structured materials

Allows the securing of machine accuracy through secondary processing

Measures for high mechanical strength required parts

 

CMP equipment

Advantage of Application

Prevents equipment deterioration from corrosive fluids or corrosive atmospheres

Prevents cross contamination from CMP slurry sticking

Improved washability

   

Exhaust line

Advantage of Application

Prevents corrosion from etching gas

Reduces sticking of depot matter

Silicon wafer edge damage decreases

   
Please inquire us for fluoropolymer coating.Do not hesitate to contact us.
Tokyo Osaka(head office)
TEL.+81-3-3688-3237 TEL.+81-72-361-3391
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